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Method of making a piezoelectric transducer having protuberances for transmitting acoustic energy

Patent 6321428 Issued on November 27, 2001. Estimated Expiration Date: Icon_subject March 28, 2020. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

Piezoelectric film sonic emitter Patent #: 6011855
Issued on: 01/04/2000
Inventor: Selfridge, et al.

Inventors

Assignee

Application

No. 537199 filed on 03/28/2000

US Classes:

29/25.35, PIEZOELECTRIC DEVICE MAKING310/328, With mechanical energy coupling means310/800, PIEZOELECTRIC POLYMERS (E.G., MYLAR, PVDF)381/114, With piezoelectric microphone381/190Electrostrictive, magnetostrictive, or piezoelectric

Examiners

Primary: Hall, Carl E.

Attorney, Agent or Firm

International Class

H01L 041/00

Abstract

A method of forming an ultrasound transducer having thermoformed protuberances comprises providing a substrate having a plurality of perforations of a given dimension. The perforations or apertures are formed in the substrate and operate to determine the resonance frequency associated with the transducer. A film of polymeric material capable of showing piezoelectric properties when strained in its plane and electrically biassed by a field applied in a direction normal to its faces, is then laminated onto the substrate. The film is heated to a given temperature and a pressure differential is applied between the top and bottom surfaces of the film for a sufficient time to form protuberances in the film through the apertures in the substrate. The film is then cooled to a given ambient temperature while maintaining a pressure differential between the top and bottom surfaces of the film for a sufficient time until the ambient temperature is reached so as to cause the protuberances to maintain a substantially permanent curvature.

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