Folded spring based micro electromechanical (MEM) RF switch
Patent 6307452 Issued on October 23, 2001. Estimated Expiration Date: 
September 16, 2019. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
September 16, 2019. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesMicro electromechanical RF switch Micromechanical microwave switching Monolithically integrated switched capacitor bank using micro electro mechanical system (MEMS) technology Patent #: 5880921 InventorAssigneeApplicationNo. 397313 filed on 09/16/1999US Classes:333/262, Switch361/233Use of forces of electric charge or fieldExaminersPrimary: Bettendorf, Justin P.Assistant: Takaoka, Dean Attorney, Agent or FirmInternational ClassH01G 023/00AbstractA micro electromechanical switch is formed on a substrate using a microplatform structure suspended on a spring suspension. The spring suspension is attached on one end to an anchor structure and extends in a substantially octagonal direction over a signal line. The microplatform has a shorting bar positioned facing a gap in the signal line and an electrical corset is formed on the signal fine to form a capacitor structure which is electrostatically attractable toward a bottom electrode upon application of a selected voltage. The switch functions from DC to at least 50 GHz with an electrical isolation of 35 dB and an insertion loss of 0.5 dB at 20 GHz. The RF switch has applications in telecommunications including wireless communications. | |
