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Semiconductor integrated circuit device

Patent 6307236 Issued on October 23, 2001. Estimated Expiration Date: Icon_subject October 6, 2018. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

Semiconductor integrated circuit device and process for manufacturing the same
Patent #: 5270944
Issued on: 12/14/1993
Inventor: Kuroda, et al.

Semiconductor integrated circuit having a stand-by current reducing circuit
Patent #: 5274601
Issued on: 12/28/1993
Inventor: Kawahara, et al.

Semiconductor integrated circuits with power reduction mechanism
Patent #: 5408144
Issued on: 04/18/1995
Inventor: Sakata, et al.

Semiconductor integrated circuit device having power reduction mechanism
Patent #: 5583457
Issued on: 12/10/1996
Inventor: Horiguchi, et al.

Semiconductor integrated circuit device having power reduction mechanism Patent #: 5614847
Issued on: 03/25/1997
Inventor: Kawahara, et al.

Inventors

Assignee

Application

No. 155801 filed on 10/06/1998

US Classes:

257/392, Insulated gate field effect transistors of different threshold voltages in same integrated circuit (e.g., enhancement and depletion mode)257/402, With permanent threshold adjustment (e.g., depletion mode)257/406, Plural gate insulator layers257/410, Gate insulator includes material (including air or vacuum) other than SiO 2257/411, Composite or layered gate insulator (e.g., mixture such as silicon oxynitride)257/E21.623, Gate conductors with different gate conductor materials or different gate conductor implants, e.g., dual gate structures (EPO)257/E21.626, With particular manufacturing method of gate sidewall spacers, e.g., double spacers, particular spacer material or shape (EPO)257/E27.06, Field-effect transistor with insulated gate (EPO)257/E27.061Combination of depletion and enhancement field-effect transistors (EPO)

Examiners

Primary: Wojciechowicz, Edward

Attorney, Agent or Firm

Foreign Patent References

  • 61-168954 JP. 07/12/1986
  • 2-140971 JP. 05/12/1990
  • 2-156675 JP. 06/12/1990
  • 2-271659 JP. 11/12/1990
  • 3-94464 JP. 04/12/1991
  • 3-153079 JP. 07/12/1991
  • 4-85868 JP. 03/12/1992
  • 4-260364 JP. 09/12/1992
  • 5-108562 JP. 04/12/1993
  • 6-196495 JP. 07/12/1994
  • 7-38417 JP. 02/12/1995

International Class

H01L 029/72

Foreign Application Priority Data

1996-04-08 JP

Abstract

The present invention is drawn to a semiconductor integrated circuit device employing on the same silicon substrate a plurality of kinds of MOS transistors different in magnitude of tunnel current flowing either between the source and gate or between the drain and gate thereof. These MOS transistors include tunnel-current increased MOS transistors at least one of which is for use in constituting a main circuit of the device. The plurality of kinds of MOS transistors also include tunnel-current reduced or depleted MOS transistors at least one of which is for use with a control circuit. This control circuit is inserted between the main circuit and at least one of two power supply units. The control circuit is responsive to receipt of a control signal supplied thereto for controlling the flow of a current either between the source and gate or between the drain and gate of the tunnel-current increased MOS transistor for use with the main circuit in such a way that the current flow is selectively permitted during certain time period and that it is inhibited during another period.

Other References

  • IEEE Electron Device Meeting Technical Digest, 1993, "Sub-50 NM Gate Length N-MOSFETS With 10 NM Phosphorus Source And Drain Junctions", M. Ono et al, pp. 6.2.1-6.2.4
  • IEEE 1994 Custom Integrated Circuits Conference, "Limitation of CMOS Supply-Voltage Scaling by MOSFET Threshold-Voltage Variation", S. Sun et al, pp. 12.2.1-12.2.4
  • P.J. Wright et al, "Thickness Limitations of SiO2 Gate Dielectrics for MOS ULSI", IEEE Transactions On Electron Devices, vol. 37, No. 8, Aug. 1990, pp. 1884-189
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