Fiber optic fiber Fabry-Perot interferometer diaphragm sensor and method of measurement

Patent 6281976 Issued on August 28, 2001. Estimated Expiration Date:

April 8, 2018. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Abstract Claims Description Full Text

Patent References

Method for fiber optic transmission of a special coded measurement
Patent #: 4705354
Issued on: 11/10/1987
Inventor: Ulrich

Electric and electromagnetic field sensing system including an optical transducer
Patent #: 5280173
Issued on: 01/18/1994
Inventor: Morse, et al.

Extrinsic fiber optic displacement sensors and displacement sensing systems
Patent #: 5301001
Issued on: 04/05/1994
Inventor: Murphy, et al.

Fiber optic hydrophone
Patent #: 5311485
Issued on: 05/10/1994
Inventor: Kuzmenko, et al.

Metal cup pressure transducer with a support having a plurality of thermal expansion coefficients
Patent #: 5315110
Issued on: 05/24/1994
Inventor: Smith

Method and apparatus for measuring pressure with embedded non-intrusive fiber optics
Patent #: 5452087
Issued on: 09/19/1995
Inventor: Taylor, et al.

Method and apparatus for measuring pressure with fiber optics
Patent #: 5714680
Issued on: 02/03/1998
Inventor: Taylor, et al.

Fiber optic pressure sensor with passive temperature compensation
Patent #: 5844667
Issued on: 12/01/1998
Inventor: Maron

Multi-parameter fiber optic sensor for use in harsh environments Patent #: 5892860
Issued on: 04/06/1999
Inventor: Maron, et al.

Inventors

Application

No. 057410 filed on 04/08/1998

US Classes:

356/480Resonant cavity

Examiners

Primary: Font, Frank G.
Assistant: Natividad, Phil

Attorney, Agent or Firm

Baker Botts L.L.P.

International Class

G01B 009/02

Abstract

A fiber optic fiber Fabry-Perot interferometer diaphragm sensor and method of measurement is provided. A fiber Fabry-Perot interferometer diaphragm sensor (12a, 12b, 12c) includes a base (54a, 54b, 54c) and a diaphragm (52a, 52b, 52c) with an optic fiber (30) coupled under tension between the base (54a, 54b, 54c) and the diaphragm (52a, 52b, 52c). A fiber Fabry-Perot interferometer element (40) is contained within the optic fiber (30) and operates to sense movement of the diaphragm (52a, 52b, 52c). In a particular embodiment, the diaphragm (52a) moves in response to a pressure (P) applied to the diaphragm (52a). In another embodiment, a proof mass (72) is coupled to the diaphragm (52b) such that the diaphragm (52b) moves in response to an acceleration (A). In yet another embodiment, a magnetic body (80) is coupled to the diaphragm (52c) such that the diaphragm (52c) moves in response to a magnetic field (M).

Other References

C. E. Lee, H. F. Taylor: Interferometric Optical Fibre Sensors Using Internal Mirrors, Electronics Letters, vol. 24 No. 4 pp. 193-194, Feb. 18, 1988
C. E. Lee, R. A. Atkins, and H. F. Taylor: Performance of a fiber-optic temperature sensor from -200 to 1050° C., Optical Society of America, .COPYRGT. 1988
C. E. Lee, H. F. Taylor, A. M. Markus, and E. Udd: Optical-fiber Fabry-Perot Embedded Sensor, Optical Society of America, .COPYRGT. 1989
Yunhae Yeh, Chung E. Lee, Robert A. Atkins, William N. Gibler, and Henry F. Taylor: Fiber Optic Sensor for Substrate Temperature Monitoring, J.Vac.Sci.Technol. A 8 (4), Jul./Aug. 1990
Jorge J. Alcoz, C. E. Lee, and Henry F. Taylor: Embedded Fiber-Optic Fabry-Perot Ultrasound Sensor, IEEE, .COPYRGT. 1990
C.E. Lee, W. N. Gibler, R. A. Atkins, J. J. Alcoz, and H. F. Taylor: Metal-embedded Fibre-optic Fabry-Perot Sensors, Optical Society of America, .COPYRGT. 1991
R. A. Atkins, J. H. Gardner, W. N. Gibler, C. E. Lee, M. D. Oakland, M. O. Spears, V. P Swenson, H. F. Taylor, J. J. McCoy, and G. Beshouri: Fiber-optic Pressure Sensors for Internal Combustion Engines, vol. 33, No. 7/Applied Optics, Mar. 1, 199