Advanced process control for semiconductor manufacturing
May 18, 2018. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesMethod and apparatus for on-line monitoring of the operation of a complex non-linear process control system System and method for performing real time data acquisition, process modeling and fault detection of wafer fabrication processes Method and apparatus for inspecting manufactured products for defects in response to in-situ monitoring System for real-time economic optimizing of manufacturing process control Systems, methods and computer program products for generating digital multimedia store displays and menu boards Patent #: 6038545 InventorsAssigneeApplicationNo. 080620 filed on 05/18/1998US Classes:700/121, Integrated circuit production or semiconductor fabrication700/48, Neural network700/95, Product assembly or manufacturing700/106, Material requirement700/115, Product tracking (e.g., having product or carrier identification)700/116, Having identification controlled manufacturing operation705/14, Distribution or redemption of coupon, or incentive or promotion program705/15, Restaurant or bar705/27, Presentation of image or description of sales item (e.g., electronic catalog browsing)705/28, Inventory management709/223COMPUTER NETWORK MANAGINGExaminersPrimary: Grant, WilliamAssistant: Patel, Ramesh Attorney, Agent or FirmInternational ClassG06F 019/00AbstractAn Advanced Process Control (APC) Framework performs automatic process control operations through the design and development of a software framework that integrates factory, process, and equipment control systems. The APC Framework benefits semiconductor-manufacturing factories, or "fabs," throughout the development of the APC Framework by using an iterative development approach. The APC Framework is designed to integrate seamlessly with commercially-available APC tools. The APC Framework specifies components and a component structure that enable multiple vendors to build and sell framework-compatible products using an open architecture that accommodates plug-and-play components. The APC Framework advantageously increases product yield distributions and equipment utilization, and lowers defect densities.Field of SearchNeural networkExpert system Product assembly or manufacturing Integrated system (Computer Integrated Manufacturing (CIM) Design or planning Material requirement Product tracking (e.g., having product or carrier identification) Having identification controlled manufacturing operation Integrated circuit production or semiconductor fabrication COMPUTER NETWORK MANAGING Computer network monitoring Computer network access regulating Network resource allocating Distribution or redemption of coupon, or incentive or promotion program Restaurant or bar Presentation of image or description of sales item (e.g., electronic catalog browsing) Price look-up processing (e.g., updating) Allocating resources or scheduling for an administrative function | |
