Capacitive micromachined ultrasonic transducer arrays with reduced cross-coupling
Patent 6262946 Issued on July 17, 2001. Estimated Expiration Date: 
September 29, 2019. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
September 29, 2019. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesPlate-mode ultrasonic sensor Broadband microfabriated ultrasonic transducer and method of fabrication Microfabricated ultrasonic immersion transducer Silicon micromachined capacitive pressure sensor and method of manufacture Patent #: 6109113 InventorsApplicationNo. 408156 filed on 09/29/1999US Classes:367/181, Capacitive367/153, Plural transducer array367/174, Transducer with diaphragm381/174, Capacitive381/191Having electrostatic element (e.g., electret, vibrating plate)ExaminersPrimary: Lobo, Ian J.Attorney, Agent or FirmInternational ClassH04R 019/00AbstractThere is described a capacitive micromachined ultrasonic transducer array which is configured to minimize the excitation and propagation of plate waves traveling in the substrate and ultrasonic waves propagating at the interface between the array surface and the immersion fluid.Other References
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