Process and system for separation and recovery of perfluorocompound gases

Patent 6254666 Issued on July 3, 2001. Estimated Expiration Date:

March 28, 2020. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Abstract Claims Description Full Text

Patent References

2947687

2953502

2960462

2970106

3508994

3616607

3648845

Process for manufacturing thin, non-porous gas permeable polycarbonate films
Patent #: 4086310
Issued on: 04/25/1978
Inventor: Bottenbruch, et al.

Asymmetric polyimide membranes
Patent #: 4113628
Issued on: 09/12/1978
Inventor: Alegranti

Method for casting ultrathin methylpentene polymer membranes
Patent #: 4132824
Issued on: 01/02/1979
Inventor: Kimura , et al.

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Inventors

Assignee

Application

No. 536687 filed on 03/28/2000

US Classes:

95/39, COMPRESSING AND INDIRECT COOLING OF GASEOUS FLUID MIXTURE TO SEPARATE95/45, Selective diffusion of gases through substantially solid barrier (e.g., semipermeable membrane, etc.)95/47, Nitrogen or nitrogen containing compound permeates barrier95/53, Helium permeates barrier95/55Hydrogen permeates barrier

Examiners

Primary: Spitzer, Robert

Attorney, Agent or Firm

Burns, Doane, Swecker, & Mathis, LLP

Foreign Patent References

0 239 190 A2 EP. 09/24/1987
0 358 915 A2 EP. 03/24/1990
0 389 126 EP. 09/24/1990
61-187918 JP. 08/24/1986
63-126522 JP. 05/24/1988
4322716 JP. 11/24/1991
3-284335 JP. 12/24/1991
4016213 JP. 01/24/1992
6-254367 JP. 09/24/1994
WO 90/15662 WO. 12/24/1990

International Class

B01D 053/22

Abstract

Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises the steps of a) providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predetermined pressure; b) providing at least one glassy polymer membrane having a feed side and a permeate side; c) contacting the feed side of the at least one membrane with the gas mixture; d) withdrawing from the feed side of the membrane as a non-permeate stream at a pressure which is substantially equal to the predetermined pressure a concentrated gas mixture comprising essentially the at least one perfluorocompound gas; and e) withdrawing from the permeate side of the membrane as a permeate stream a depleted gas mixture comprising essentially the at least one carrier gas.

Other References

Polymeric Gas Separation Membranes, edited by D.R. Paul, Yuri P. Yampol'skii, CRC Press, Inc. 1994
Chemical Mechanical Technology 41, New Development of High-Level Separation, edited by Kagaku Kogaku Kai published by San-ei Shuppan, May 20, 1989 (partial translation provided)
Desalination, Treatment of landfill gas by gas permeation--pilot plant results and comparison to alternatives, R. Rautenbach and K. Welsch, published by Elsevier Science Publishers B.V., 1993
Mechanical Engineers Handbook, edited by Nihon Kikai Gakkai, Apr. 15, 1987
Basic Principles of Membrane Technology, Marcel Mulder, Kluwer Academic Publishers, 1991
Latest Membrane Treatment Technology and Applicaion Thereof, edited by Hiroshi Shimizu and Masato Nisihmura (supervisors), published by Fuji Technosystem, Aug. 1, 1984 (partial translation provided)
Michael T. Mocella, "Perfluorocompound Emission from Semiconductor Processing Tools": An Overview of Options and Strategies, Global Warning Symposium, Dallas, TX, Jun. 7-8, 1994
Larry Anderson, Vector Technology's Phoenix Combustor, Global Warming Symposium, Dallas, TX, Jun. 7-8, 1994
AT&T Microelectronics and Novapure Corp, PFC Concentration and Recycle, Global Warning Symposium, Dallas, TX, Jun. 7-8, 1994
Air Liquids America Corporation, Solval™ Solvent Condensation and Recovery System, Technical Bulletin, 1994
Shan-Tao Hsieh and George E. Keller, II., "Separation of Hydrogen From Silan Via Membranes": A Step in the Production of Ultra-High-Purity Silicon, Journal of Membrane Science, 70 (1992) pp. 143-152
Japanese Abstract Only JP60022902, from the European Patent Office Abstract 85-066277
Carson, William M.; Christian, Kimberly A.; Crossland, Eugene C.; Hsiung, Thomas H.; Ridgeway, Robert G.; and Yang, James H. "Large Scale PFC Capture System." (Air Products and Chemicals, Inc.) Presented at SEMICON Southwest, Austin, TX, Oct. 13, 1997
Stannett, V.; and Williams, J.L. "The Permeability of Poly(ethyl Methacrylate) to Gases and Water Vapor." Journal of Polymer Science: Part C, No. 10, pp. 45-49, (1965)
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