Patent ReferencesLaser mode locking method and apparatus Diode-pumped optical parametric oscillator Multiwavelength solid state laser using frequency conversion techniques Resonant nonlinear laser beam converter Intracavity sum frequency generation using a tunable laser containing an active mirror Multi quasi phase matched interactions in a non-linear crystal Three-color coherent light system Ultraviolet solid state laser, method of using same and laser surgery apparatus Single-crystal lithium tetraborate and method making the same, optical converting method and converter device using the single-crystal lithium tetraborate, and optical apparatus using the optical converter device Patent #: 5805626 InventorsAssigneeApplicationNo. 264941 filed on 03/09/1999US Classes:359/326, OPTICAL FREQUENCY CONVERTER359/328, Harmonic generator372/22Frequency multiplying (e.g., harmonic generator)ExaminersPrimary: Lee, John D.Attorney, Agent or FirmForeign Patent References
International ClassG02F 001/35Foreign Application Priority Data1998-03-13 JPAbstractTo obtain a laser beam the wavelength of 200 nm or less the repetition frequency of which is high, to reduce damage applied to mineral material such as synthetic fused silica, to extend the life of a stepper and others, to extend the life of laser parts without using toxic gas, to enhance the throughput of a stepper and others by enabling the compatibility of a high repetition frequency with the stability of a pulse, to realize an ultraviolet radiation source the whole of which is composed of a solid and to solve the problems of reliability, size, maintenance, a plumbing and others and sufficiently enhance reliability, the following procedure is taken. A second harmonic with the wavelength of 532 nm is acquired by converting the wavelength of a laser beam with the wavelength of 1.06 μm from a laser, a fourth harmonic with the wavelength of 266 nm is acquired by further converting the wavelength of the laser beam, a laser beam with the wavelength of approximately 700 nm is acquired by oscillating a titanium sapphire laser using a laser beam with the wavelength of 532 nm acquired by converting the wavelength of the above second harmonic or a laser beam from the above laser and a laser beam with the wavelength of approximately 190 nm is acquired by mixing the above laser beam and the laser beam with the wavelength of 266 nm on a nonlinear crystal in a laser to be a sum frequency.Other References
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