Abstract

A multispot scanning optical microscope image acquisition system for confocal and conventional imaging, metrology, real-time viewing, inspection and review of an object features an array of multiple separate focused light spots illuminating the object and a corresponding array detector detecting light from the object for each separate spot. Scanning the relative positions of the array and object at a slight angle to the rows of the spots allows an entire field of the object to be successively illuminated and imaged in a swath of pixels. The scan speed and detector readout direction and speed are coordinated to provide precise registration of adjacent pixels despite delayed acquisition by the adjacent columns of light spots and detector elements. The detector elements are sized and spaced apart to minimize crosstalk for confocal imaging and the illuminating spots can likewise be apodized to minimize sidelobe noise.

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