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Method and system for emitter partitioning for SiGe RF power transistors

Patent 6236072 Issued on May 22, 2001. Estimated Expiration Date: Icon_subject November 12, 2018. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

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Inventors

Assignee

Application

No. 189804 filed on 11/12/1998

US Classes:

257/197, Bipolar transistor257/560, With multiple collectors or emitters257/563, With multiple separately connected emitter, collector, or base regions in same transistor structure257/578, With enlarged emitter area (e.g., power device)257/579, With separate emitter areas connected in parallel257/580, With current ballasting means (e.g., emitter ballasting resistors or base current ballasting means)257/E29.032, Noninterconnected multiemitter structures (EPO)257/E29.193, Comprising lattice mismatched active layers (e.g., SiGe strained layer transistors) (EPO)438/312, Having heterojunction438/342Having multiple emitter or collector structure

Examiners

Primary: Mintel, William

Attorney, Agent or Firm

International Classes

H01L 027/082
H01L 027/102
H01L 029/70
H01L 031/11

Abstract

A power transistor includes a plurality of emitter regions and a plurality of base contacts. In order to decrease base resistance, each of the plurality of emitter regions is adjacent to at least four base contacts. The entire transistor includes multiple emitter regions, e.g., greater than or equal to about 1,000 with no upper limit wherein the actual number of emitter regions is dependent on the desired current carrying capacity. The emitter regions are directly connected in parallel to the high current carrying metal layer of the transistor through vias or metal contact studs. The size of the emitter regions should be made as small as the process design rules will allow in order to allow an increase in the perimeter to area ratio of the emitter region which, for a given current, decreases the peak current density.

Other References

  • Joachim N. Burghartz, et al., "SiGe Power HBT's for Low-Voltage, High-Performance RF Applications," IEEE Electronics Device Letters, vol. 19, No. 4, Apr. 1998, pp. 103-105, XP-00073878
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