Low TCR resistor
Precision resistor with improved temperature characteristics
Silicon resistor having a very low temperature coefficient
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Polysilicon resistor cooling Patent #: 5640137
ApplicationNo. 207344 filed on 12/08/1998
US Classes:338/7, RESISTANCE VALUE TEMPERATURE-COMPENSATED257/E21.004, Of resistor (EPO)257/E27.047, Resistor only (EPO)338/9, With additional compensating resistor or resistance element338/309Terminal coated on
ExaminersPrimary: Gellner, Michael L.
Assistant: Lee, Kyung S.
Attorney, Agent or Firm
International ClassH01C 007/06
AbstractAn integrated circuit containing a resistor and the resistor per se. The circuit includes a substrate (2), a semiconductor resistor (3) on the substrate and a layer of electrically insulating material (5) disposed over the substrate and the semiconductor resistor having at least one contact (11, 13, 15) extending therethrough to the semiconductor resistor, the contact having an electrical path therein extending to and forming an interface with an end portion of the semiconductor resistor. The semiconductor resistor has a semiconductor resistor body, preferably of doped polysilicon, having one of a positive or negative temperature coefficient of resistance and a resistor head. The resistor head consists essentially of the electrical path which is metal interconnect, the contacts and then interface to and from the resistor body and in contact with the resistor body, the resistor head having the other of a positive or negative temperature coefficient of resistance.