System to minimize the temperature coefficient of resistance of passive resistors in an integrated circuit process flow
December 8, 2018. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 3491325 3683306 Low TCR resistor Precision resistor with improved temperature characteristics Silicon resistor having a very low temperature coefficient Electrical partitioning scheme for improving yields during the manufacture of semiconductor memory arrays Precision power resistor with very low temperature coefficient of resistance Lightly doped polycrystalline silicon resistor having a non-negative temperature coefficient Semiconductor device having a thin-film resistor Polysilicon resistor cooling Patent #: 5640137 InventorsAssigneeApplicationNo. 207344 filed on 12/08/1998US Classes:338/7, RESISTANCE VALUE TEMPERATURE-COMPENSATED257/E21.004, Of resistor (EPO)257/E27.047, Resistor only (EPO)338/9, With additional compensating resistor or resistance element338/309Terminal coated onExaminersPrimary: Gellner, Michael L.Assistant: Lee, Kyung S. Attorney, Agent or FirmInternational ClassH01C 007/06AbstractAn integrated circuit containing a resistor and the resistor per se. The circuit includes a substrate (2), a semiconductor resistor (3) on the substrate and a layer of electrically insulating material (5) disposed over the substrate and the semiconductor resistor having at least one contact (11, 13, 15) extending therethrough to the semiconductor resistor, the contact having an electrical path therein extending to and forming an interface with an end portion of the semiconductor resistor. The semiconductor resistor has a semiconductor resistor body, preferably of doped polysilicon, having one of a positive or negative temperature coefficient of resistance and a resistor head. The resistor head consists essentially of the electrical path which is metal interconnect, the contacts and then interface to and from the resistor body and in contact with the resistor body, the resistor head having the other of a positive or negative temperature coefficient of resistance. | |
