Quality management system and recording medium
July 28, 2018. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesMethod and system for automated analysis of semiconductor defect data AC line stabilization circuitry for high power factor loads Real-time in-line defect disposition and yield forecasting system Method and system for declustering semiconductor defect data Surface inspection system and method of inspecting surface of workpiece Method and system for manufacturing semiconductor devices, and method and system for inspecting semiconductor devices Memory system having programmable control parameters Method and apparatus for inspecting manufactured products for defects in response to in-situ monitoring High accuracy particle dimension measurement system Patent #: 5966677 InventorsApplicationNo. 123457 filed on 07/28/1998US Classes:702/182, Performance or efficiency evaluation257/E21.525, Procedures, i.e., sequence of activities consisting of plurality of measurement and correction, marking or sorting steps (EPO)700/109, Quality control700/121, Integrated circuit production or semiconductor fabrication702/35, Flaw or defect detection702/81, Quality evaluation702/82Having judging means (e.g., accept/reject)ExaminersPrimary: Shah, KaminiAttorney, Agent or FirmForeign Patent References
International ClassG06F 019/00Foreign Application Priority Data1998-02-26 JPAbstractA quality management system (S100) comprises a data processing unit (11), a processed-data judgment unit (12) receiving an output from the data processing unit (11), a sampling unit (13) receiving an output from the processed-data judgment unit (12), a file making unit (14) receiving an output from the sampling unit (13), a data processing unit (15) receiving an output from an observation unit (20) and a processed-data judgment unit (16) receiving an output from the data processing unit (15). The system (S100) having this constitution allows reduction in labor and time from finding of a defect to recognition of occurrence of abnormal condition and improvement in accuracy of fatality rate of the defect.Field of SearchPerformance or efficiency evaluationFlaw or defect detection Quality evaluation Article count or size distribution Sampling Inspection Plan Quality control Having judging means (e.g., accept/reject) Quality control Defect analysis or recognition Integrated circuit production or semiconductor fabrication Digital logic testing INSPECTION OF FLAWS OR IMPURITIES Gyroscope or pendulum stabilized optical element Bore inspection (e.g., borescopes, intrascope, etc.) | |
