Piezoelectric vibrating member and its producing process

Patent 6198203 Issued on March 6, 2001. Estimated Expiration Date:

April 9, 2017. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Abstract Claims Description Full Text

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Inventor

Hotomi, Hideo

Assignee

Minolta Co., Ltd.

Application

No. 838717 filed on 04/09/1997

US Classes:

310/324Diaphragm

Examiners

Primary: Ramirez, Nestor
Assistant: Medley, Peter

Attorney, Agent or Firm

Sidley & Austin

Foreign Patent References

7-060960 JP. 03/24/1995

International Class

H01L 041/04

Foreign Application Priority Data

1996-04-12 JP

Abstract

A piezoelectric actuator 52 is produced by providing a common electrode 22 on one planar surface of a thin vibrating plate 20 of non-piezoelectric material, providing a slurry 28 prepared by dispersing a calcined powder of piezoelectric material in a solvent containing dissolved coupling agent on the common electrode, drying the slurry to produce a flexible green sheet 30, pressure molding the green sheet to produce a plurality of precursor members 34 arranged at a predetermined space, sintering the precursor members and thereby growing piezoelectric particles to produce unpolarized piezoelectric members 24, forming individual electrodes on the piezoelectric members to oppose the common electrode, and polarizing the piezoelectric members.