Polymer microactuator array with macroscopic force and displacement
Patent 6184608 Issued on February 6, 2001. Estimated Expiration Date: 
December 29, 2018. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
December 29, 2018. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 2975307 3070775 Electromechanical film and procedure for manufacturing same Microelectromechanical transducer and fabrication method Unidirectional supporting structure for microelectromechanical transducers Micro-actuator Porous gas reservoir electrostatic transducer Patent #: 5682075 InventorsAssigneeApplicationNo. 223368 filed on 12/29/1998US Classes:310/309ElectrostaticExaminersPrimary: Budd, Mark O.Attorney, Agent or FirmForeign Patent References
International ClassH02N 001/00AbstractA microactuator array device, which includes a plurality of generally parallel thin flexible polymer sheets bonded together in a predetermined pattern to form an array of unit cells on at least one layer. Thin conductive and dielectric films are deposited on the sheets to form a plurality of electrodes associated with the array of unit cells. A source of electric potential operably connects the electrodes, whereby electrostatic forces are generated most intensely proximate the point where the gap between the sheets is smallest. Inlets and outlets for each cell permit displacement of fluid during generation of the electrostatic forces. In a preferred embodiment, the plurality of sheets forms a stack of layers of arrays of unit cells. The layers are configured such that bi-directional activation is caused by pairs of actuators working opposite each other. At least one of every pair of the sheets may be preformed into corrugations or into flaps to provide a predetermined mechanical bias between the pairs, or the sheets may form curved portions by an applied load to provide a displacement between the pairs. The sheets are preferably from about 1 μm to about 100 μm thick and the cells preferably have an individual displacement of from about 5 μm to about 200 μm.Other References
| |
