Stage construction incorporating magnetically levitated movable stage
Patent 6184596 Issued on February 6, 2001. Estimated Expiration Date: 
December 23, 2017. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
December 23, 2017. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 3405290 3609418 Dynamoelectric machinery utilizing superconductive windings High performance magnetic bearing systems using high temperature superconductors Patent #: 5747426 InventorAssigneeApplicationNo. 998038 filed on 12/23/1997US Classes:310/12LinearExaminersPrimary: LaBalle, Clayton E.Attorney, Agent or FirmInternational ClassH02K 041/02Foreign Application Priority Data1995-06-30 JPAbstractThe stage construction of the present invention includes a fixed stage and a magnetically levitated movable stage which is driven in mutually perpendicular X, Y, and Z axis directions with respect to the fixed stage by magnetic action between itself and the fixed stage. The fixed stage includes a magnet and a closed plenum in which the magnet is sealed. The movable stage includes a magnetic material which is opposed to the magnet and which experiences an attractive or repulsive magnetic force with respect to the magnet. | |
