Resonant sensor and method of making a pressure sensor comprising a resonant beam structure

Patent 6182513 Issued on February 6, 2001. Estimated Expiration Date:

December 23, 2018. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Abstract Claims Description Full Text

Patent References

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Inventors

Assignee

Radi Medical Systems AB

Application

No. 219794 filed on 12/23/1998

US Classes:

73/704, Vibrating strip or wire73/715Diaphragm

Examiners

Primary: Fuller, Benjamin R.
Assistant: Aw-Musse, Abdullahi

Attorney, Agent or Firm

Foley & Lardner

Foreign Patent References

40 39 846 A1 DE. 06/13/1992
0 244 086 EP. 04/13/1987
0 506 554 A1 EP. 09/13/1992
0 557 216 A1 EP. 08/13/1993
0 649 009 A2 EP. 04/13/1995
0 672 897 A2 EP. 09/13/1995

International Classes

G01L 011/00
G01L 007/08

Abstract

A resonant microbeam pressure sensor is disclosed, comprising a microbeam suspended in a diaphragm in at least one point by suspension elements. Pressure applied to the diaphragm will cause the resonance frequency of the beam to shift. This shift is detectable and proportional to the pressure. The device is manufactured by surface micromachining.