Patent References 3342205 3819149 Plug valve Butterfly valve Flush mounted sea valve Apparatus for preventing thermal damage to a preformed plug during molding of a housing therearound Resin-molded valve and method of making the same Plastic lined rotatable valve Ball valve made entirely of plastics material Connector assembly and method of manufacture Patent #: 5799986 InventorsAssigneeApplicationNo. 747245 filed on 11/12/1996US Classes:137/625.48, Reciprocating valve unit137/375, Jacketed251/363With sealExaminersPrimary: Fox, John C.Attorney, Agent or FirmForeign Patent References
International ClassF16K 011/07Foreign Application Priority Data1995-11-14 JPAbstractPick-up tools and other devices for handling semiconductor wafers are require to be capable of withstanding corrosive chemical substances and extreme temperatures, and the valve unit for use in such devices must meet these requirements. The valve unit is also desired to be free from electrostatic charging. To this end, the valve unit comprises a valve main body, having a valve seat defined therein, which is made of relatively electroconductive and self-lubricating material such as PTFE, and a valve case which is injection molded around the valve unit and made of a material having some electroconductivity and a high resistance against deformation such as PEEK mixed with carbon fibers. Provision of annular grooves on the outer surface of the valve main body improves the attachment between the valve main body and the valve case so as to improve both the sealing performance and the mechanical integrity of the valve unit. |
|