Sieve like structure for fluid flow through structural arrangement
April 14, 2018. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesAir baffle assembly for electronic circuit mounting frame Ventilated cabinet for containing gas supply vessels Semiconductor converter Mounting plate storing conductor function Control apparatus or system for purged and pressurized enclosures for electrical equipment Mounting plate Delivery of reactive gas from gas pad to process tool Modular pneumatic control systems Modular bottle-mounted gas management system Gas handling device assembly used for a CVD apparatus InventorsAssigneeApplicationNo. 060519 filed on 04/14/1998US Classes:137/1, PROCESSES62/418, Foraminous gas distributor flow connected to cooler unit118/715, GAS OR VAPOR DEPOSITION137/270, Unit orientable in a single location between plural positions137/884Sectional block structureExaminersPrimary: Lund, Jeffrie R.Attorney, Agent or FirmForeign Patent References
International ClassesF24F 011/00C23C 016/00 AbstractGenerally, A system for providing fluid flow through a structural arrangement is described. Specifically, a containment system for a modular gas system is described.In the present invention, air flow enters an encasement entry port. The air travel through a channel to a mounting plane enter surface area. The air flow is directed through the mounting plane and then through the modular gas system. From there, air flow is directed within an encasement towards an exit port. The air then enters a capture system which contains any gas that may have escaped the gas system and vents off purified air.In an alternate embodiment, the channel couples the gas system exit surface area to the exit port. In another alternate embodiment, the channel couples the mounting plane exit surface area to the exit port. In yet another embodiment, the channel couples the entry port to the gas system enter surface area.Additionally, many details that may apply to any of the above embodiments or an embodiment of the present invention are described. These include, a small cross sectional area entrance port to maximize intake air flow, a plugs for openings in the mounting plane that reside beneath wide gaps in the gas system, passages in the channel sidewalls to remove dead spots in the encasement, additional entrance ports to allow the removal of various dead spots within the encasement.Field of SearchGAS OR VAPOR DEPOSITIONPROCESSES With control of flow by a condition or characteristic of a fluid By speed of fluid By fluid pressure Involving pressure control CONVERTIBLE Units interchangeable between alternate locations Sectional block structure Unit orientable in a single location between plural positions With electrical component cooling Foraminous gas distributor flow connected to cooler unit | |
