Process control system using feed forward control threads based on material groups
Patent 6148239 Issued on November 14, 2000. Estimated Expiration Date: 
December 12, 2017. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
December 12, 2017. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesOperator station for manufacturing process control system Attenuated phase shift mask with halftone boundary regions Patent #: 5786114 InventorsAssigneeApplicationNo. 989963 filed on 12/12/1997US Classes:700/1, GENERIC CONTROL SYSTEM, APPARATUS OR PROCESS700/10, Of analog controllers700/17, Operator interface (e.g., display with control)700/29, Having model700/247, Plural controlled devices or plural nonvision controlling devices703/18Power systemExaminersPrimary: Grant, WilliamAssistant: Marc, McDieunel Attorney, Agent or FirmInternational ClassG05B 015/00AbstractA process control system using feed forward control threads based on material groups performs material tracking to account and adjust for variability of processing in a process flow that includes multiple machines, machine configurations, and machine setups. The process control system using feed forward control threads based on material groups distinguishes variations in processing parameters and characteristics for processed material samples and modifies processing at subsequent steps in response to the variations. The process control system using feed forward control threads based on material groups controls materials groups so that material samples with a like processing history are processed with a similar machine configuration or setup for subsequent processing steps. The tagging of material groups permits management of material having different process characteristics in a process flow to improve the efficiency of material scheduling by supplying information to assist sorting of materials based on a manufacturing signature.Other References
Field of SearchGENERIC CONTROL SYSTEM, APPARATUS OR PROCESSHaving operator control interface (e.g., control/display console) Feed-forward (e.g., predictive) Having model Plural controlled devices or plural nonvision controlling devices Of analog controllers Operator interface (e.g., display with control) Radiation mask INCLUDING CONTROL FEATURE RESPONSIVE TO A TEST OR MEASUREMENT With treated material cooling means | |
