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Process for fabricating polycrystalline semiconductor thin-film solar cells, and cells produced thereby

Patent 6137048 Issued on October 24, 2000. Estimated Expiration Date: Icon_subject December 22, 2018. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

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Inventors

Application

No. 218206 filed on 12/22/1998

US Classes:

136/260, Cadmium containing136/256, Contact, coating, or surface geometry136/265, Copper, lead, or zinc containing438/487Utilizing wave energy (e.g., laser, electron beam, etc.)

Examiners

Primary: Chapman, Mark

Attorney, Agent or Firm

International Class

H01L 031/00

Abstract

A novel, simplified method for fabricating a thin-film semiconductor heterojunction photovoltaic device includes initial steps of depositing a layer of cadmium stannate and a layer of zinc stannate on a transparent substrate, both by radio frequency sputtering at ambient temperature, followed by the depositing of dissimilar layers of semiconductors such as cadmium sulfide and cadmium telluride, and heat treatment to convert the cadmium stannate to a substantially single-phase material of a spinel crystal structure. Preferably, the cadmium sulfide layer is also deposited by radio frequency sputtering at ambient temperature, and the cadmium telluride layer is deposited by close space sublimation at an elevated temperature effective to convert the amorphous cadmium stannate to the polycrystalline cadmium stannate with single-phase spinel structure.

Other References

  • Wu X.; Sheldon, P.; Mahathongdy, Y.; Ribelin, R.; Mason, A.; Moutinho, H.R.; Coutts, T.J.; CdS/CdTe Thin-Film Solar Cell with a Zinc Stannate Buffer Layer, NREL, Department of Energy, Oct. 1998
  • Wu, X.; Sheldon, P.; Coutts, T.J.; Rose D.H.; Moutinho, H.R.; Application of Cd2SnO4 Transparent Conducting Oxides in Cd2S/CdTe Thin-Film Devices, NREL, Department of Energy, 26th PVSD, pp. 347-350, Sep. 30-Oct. 3, 1997
  • Wu, X.; Sheldon, P.; Coutts, T.J.; Rose, D.H.; Mulligan, W.P.; Moutinho, H.R.; CP394, NREL, Department of Energy, Photovoltaics Program Review, CdS/CdTe Thin-Film Devices Using a Cd2SnO4 Transparent Conducting Oxide, pp 693-702, AIP Press, 199
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