Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same
Patent 6127908 Issued on October 3, 2000. Estimated Expiration Date: 
November 17, 2017. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
November 17, 2017. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 3573674 3597709 3736536 3796976 Linear polarization selective screen Variable gain power amplifier Optical shutter switching matrix Miniature dynamically tunable microwave and millimeter wave device Electric display device Low inductance cantilever switch InventorsApplicationNo. 972224 filed on 11/17/1997US Classes:333/246, Strip type330/66, With printed circuits333/105, Having mechanical switching means333/202, Wave filters including long line elements333/262, Switch333/263, Including variable impedance336/10, ADJUSTABLE INDUCTOR338/97, Unitary movable contact electrically bridges resistance portions338/200, With switch338/202, MOVABLE CONTACT STRUCTURE361/278, With significant electrode or terminal feature361/281, Electrical361/287, Mechanically variable361/292By varying effective area of electrodeExaminersPrimary: Pascal, RobertAssistant: Summons, Barbara Attorney, Agent or FirmForeign Patent References
International ClassesH01P 001/10H01C 010/06 H01G 005/011 H03F 001/00 AbstractA microelectro-mechanical device which includes a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent the fixed electrode. The device includes first and second electrically conductive regions which are isolated from one another by the fixed electrode. The moveable electrode moves to cover the fixed electrode and to electrically couple to the second conductive region, thus electrically coupling the first and second conductive regions, in response to a potential being applied across the fixed and moveable electrodes. The fixed electrode is transparent to electromagnetic signals or waves and the moveable electrode impedes or allows transmission of electromagnetic signals or waves. In one embodiment of the invention, the fixed and moveable electrodes are configured within an array of similar devices, and each device or groups of devices in the array are individually addressable to actuate the moveable electrodes. In another embodiment of the invention, there is provided a reconfigurable circuit including an array of actuatable devices which are addressed individually or in selected groups, each of the actuatable devices having a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent the fixed electrode.Other References
Field of SearchIncluding switching meansHaving long line elements Having mechanical switching means Wave filters including long line elements Switch Including variable impedance Strip type ADJUSTABLE INDUCTOR Resistance element adjustably short-circuited Spring contact strip progressively pressed along element Unitary movable contact electrically bridges resistance portions With switch Switch connects plural elements in parallel MOVABLE CONTACT STRUCTURE With printed circuits Variable With significant electrode or terminal feature Electrical Mechanically variable By varying effective area of electrode | |
