Semiconductor product manufacturing execution system and semiconductor product manufacturing method
October 1, 2017. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesMethod for producing semiconductor devices Production system with order of processing determination Method and apparatus for forming lot Bar code recipe selection system using workstation controllers Computer-controlled individual chip management system for processing wafers System for automatically producing different semiconductor products in different quantities through a plurality of processes along a production line Method and device for manufacturing a semiconductor chip System for providing integrated monitoring, control and diagnostics functions for semiconductor spray process tools Patent #: 5591299 InventorsApplicationNo. 942442 filed on 10/01/1997US Classes:700/121, Integrated circuit production or semiconductor fabrication700/105Rework or engineering changeExaminersPrimary: Grant, WilliamAssistant: Garland, Steven R. Attorney, Agent or FirmInternational ClassG06F 019/00Foreign Application Priority Data1996-10-02 JPAbstractA process flow, in which wafer processing conditions are described for forming a semiconductor through a plurality of processes, is formed for each lot in one type. A wafer processing is formed for each lot in one type of semiconductor in accordance with the process flow. When a different processing condition should be described according to a wafer in the lot in a certain process of the process flow, the process flow forming includes forming a plurality of different flows in that process by defining division/combination locations from a parent flow. When a faulty processing occurs in the wafer processing in a certain process, the process flow associated with that process is reformed, and a reprocessing is performed in accordance with the reformed process flow.Field of SearchINCLUDING CONTROL RESPONSIVE TO SENSED CONDITIONREPAIR OR RESTORATION Means to assemble electrical device Integrated circuit production or semiconductor fabrication Integrated system (Computer Integrated Manufacturing (CIM) Design or planning Rework or engineering change Performance monitoring Quality control Product tracking (e.g., having product or carrier identification) Having identification controlled manufacturing operation Resource allocation Having an identification code Identification code determines article destination Plural processors Having particular work transport control between manufacturing stations Mobile transport Quality control Itemization of parts, supplies, or services (e.g., bill of materials) | |
