U.S. patents available from 1976 to present.
U.S. patent applications available from 2005 to present.

Low cost, high pumping rate electrostatically actuated mesopump

Patent 6106245 Issued on August 22, 2000. Estimated Expiration Date: Icon_subject June 25, 2018. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

3381623

3803424

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Inventor: Paterson

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Issued on: 03/17/1992
Inventor: Weinberg

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Patent #: 5176358
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More ...

Inventor

Assignee

Application

No. 104504 filed on 06/25/1998

US Classes:

417/322, Magnetostrictive chamber417/62, ALTERNATE SERIES OR PARALLEL OPERATION OF PLURAL PUMPS417/413.1, Diaphragm type417/413.3Of semiconductor material (e.g., silicon, germanium, etc.)

Examiners

Primary: Thorpe, Timothy S.
Assistant: Gartenberg, Ehud

Attorney, Agent or Firm

International Class

F04B 035/00

Abstract

A mesopump having a plurality of elementary cells. The cells each have a body forming a cavity having an electrode on one curved surface and a second surface facing the electrode. Electrical connections selectively energize the electrode. A diaphragm is mounted under tensile load with its major portion located in the cavity so that the diaphragm deflects toward the electrode surfaces upon application of voltage to the electrode and returns to its original position when voltage is stopped. A lateral conduit is located at at least one end of the body for fluid communication with the cavity. The lateral conduits are operably connected to a portion of the diaphragm mounted in the body and are opened and closed by movement of the diaphragm. A vertical conduit on at least one curved surface controls flow of fluid by movement of the diaphragm into and out of contact with the vertical conduit. The cells are interconnected to form the mesopump whereby activation of the electrodes causes movement of the diaphragm between the electrodes to move fluid into and out of the body. The preferred mesopump includes sets of three cell groups so that fluid enters a first cell from a source of fluid, is expelled to a second cell through a vertical conduit; expelled via a lateral conduit to a third cell, and expelled therefrom, whereby fluid passes from cell to cell upon activation of the electrodes.

Other References

  • Cabuz, "Tradeoffs in MEMS Materials", SPIE vol. 2881, p. 160 (Oct. 1996)
  • Bertz, Schubert, Werner, "Silicon Grooves with Sidewall Angles down to 1° made by Dry Etching"
  • Bustgens,Bacher,Menz,Schomburg, "Micropump Manufactured by Thermoplastic Molding" MEMS 1994
  • Wagner,Quenzer, Hoerschelmann,Lisec,Juerss, "Bistable Microvalve with Pneumatically Coupled Membranes," 0-7803-2985-6/96 IEEE (1996)
  • Branebjerg,Gravesen "A New Electrostatic Actuator Providing Improved Stroke Length and Force," Micro Electro Mechanical Systems (Feb. 4-7, 1992
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