Recessed etch RF micro-electro-mechanical switch
Patent 6100477 Issued on August 8, 2000. Estimated Expiration Date: 
July 17, 2018. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
July 17, 2018. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesLaminate switch assembly having improved tactile feel and improved reliability of operation Low inductance cantilever switch Non-contact two position microeletronic cantilever switch Three-axis acceleration sensor variable in capacitance under application of acceleration Micromechanical angular accelerometer with auxiliary linear accelerometer Micro electromechanical RF switch Patent #: 5578976 InventorsAssigneeApplicationNo. 118109 filed on 07/17/1998US Classes:200/181, ELECTROSTRICTIVE OR ELECTROSTATIC73/510, Response to multiple sensing means or motion conditions200/512Membrane typeExaminersPrimary: Luebke, Renee S.Attorney, Agent or FirmInternational ClassH01H 057/00AbstractA novel micro-electro-mechanical (MEMS) RF switch having a cavity (32) in a substrate (28) which creates a spacing between a conductive membrane (34) and a bottom electrode (38). The invention eliminates the need for the dielectric posts found in prior art MEMS RF switches, includes a flexure structure (36) in the membrane (34) which will reduce the required pull down voltage for the membrane, and reduces the stress and fatigue in the membrane due to switch activation.Field of SearchMembrane typeELECTROSTRICTIVE OR ELECTROSTATIC Three layers or more Electrical output circuit With mechanical energy coupling means Including inertia type operator Switch Response to multiple sensing means or motion conditions Vibratory mass Response to both velocity and acceleration Pendulum or beam Including a bearing support | |
