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Optical switch and method for assembling the same

Patent 6072924 Issued on June 6, 2000. Estimated Expiration Date: Icon_subject September 2, 2017. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

Electrically controlled optical switching device
Patent #: 4789228
Issued on: 12/06/1988
Inventor: Le Pesant ,   et al.

Optical functional device of an optical waveguide type
Patent #: 4896930
Issued on: 01/30/1990
Inventor: Tsuchitani, et al.

Optical switch using bubbles
Patent #: 4988157
Issued on: 01/29/1991
Inventor: Jackel, et al.

Total internal reflection optical switches employing thermal activation Patent #: 5699462
Issued on: 12/16/1997
Inventor: Fouquet, et al.

Inventors

Assignee

Application

No. 921603 filed on 09/02/1997

US Classes:

385/18, Reflective-type switch385/16Switch (i.e., switching from one terminal to another, not modulation)

Examiners

Primary: Lee, John D.
Assistant: Kang, Juliana K.

Attorney, Agent or Firm

Foreign Patent References

  • 5-88030 JP. 04/13/1993
  • 5-249388 JP. 09/13/1993
  • 6-175052 JP. 06/13/1994
  • 07092405 JP. 04/13/1995
  • 07289566 JP. 11/13/1995
  • 08094866 JP. 04/13/1996
  • 08062645 JP. 08/13/1996
  • 08201856 JP. 08/13/1996
  • 08201857 JP. 08/13/1996
  • 09133932 JP. 05/13/1997

International Class

G02B 006/35

Foreign Application Priority Data

1996-09-02 JP

Abstract

An optical switch includes a substrate having therein optical waveguides made of silicon and a silicon layer deposited on its top surface. A space is formed in the crossing portion of the optical waveguides which is covered with a lid, preferably made of low alkali borosilicate glass, and which is bonded to the silicon layer by anodic bonding. Preferably, a groove is formed in a surface of the optical waveguide substrate or a bonding surface of the lid. The groove, after the lid has been bonded, makes a passage which communicates between the space and an outside. The passage is a pouring slit for pouring an index-matching liquid and is connected to the space which acts as a driving slit in which the index-matching liquid moves. In one embodiment, the width of the pouring slit is smaller than that of the driving slit. The optical switch can be manufactured by providing an optical waveguide substrate and a lid substrate, one of which is formed with a groove in its surface on which the two substrates are bonded. The optical waveguide substrate and the lid substrate are bonded together by anodic bonding to make a passage which communicates between the space formed in a crossing portion of the optical waveguides and an outside. The regulation of the volume of the index-matching liquid is time-, temperature-, or pressure-based regulation.

Other References

  • "Electrocapillarity Optical Switch"; IEICE Trans. Commun., vol. E77-B, No. 2; Makoto Sato, Feb. 1994
  • "Dynamics Of Electrocapillarity Optical Switch"; NTT Telecommunication Field Systems R&D Center; Makoto Sato and Hideo Kobayashi, 1993
  • "Optical Waveguide Switches Using Oil Movement by Interfacial Tension Control"; NTT Interdisciplinary Research Laboratories; M. Makihara, et al. 1996
  • "Self-Latching Optical Waveguide Switches Utilizing Interfacial Tension Control"; NTT Telecommunication Field Systems R&D Center; Makoto Sato and Hideo Kobayashi, 1994
  • "Self-Latching Thermo-Capillarity Optical Waveguide Switch"; NTT Opto-electronics Laboratories; Makoto Sato, et al. 1997
  • "New Self-Hold Type Optical Switch Using Matrix Optical Waveguide"; NTT Interdisciplinary Research Laboratories; S. Inagaki, et al. 199
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