Method of making a superconducting microwave component by off-axis sputtering
Patent 6057271 Issued on May 2, 2000. Estimated Expiration Date: 
May 2, 2017. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
May 2, 2017. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.InventorsAssigneeApplicationNo. 484093 filed on 06/07/1995US Classes:505/475, Sputtering204/192.24, Superconductor257/E39.018Comprising high Tc ceramic materials (EPO)ExaminersPrimary: King, Roy V.Attorney, Agent or FirmInternational ClassesH01L 039/24C23C 014/34 Foreign Application Priority Data1989-12-22 JPAbstractA microwave component includes a single dielectric layer, and one pair of conductor layers formed on opposite surfaces of the dielectric layer, respectively, one of the pair of conductor layers forming a ground conductor, and the other of the pair of conductor layers being shaped in a predetermined pattern. The pair of conductor layers are respectively formed of oxide superconductor material layers which are deposited by off-axis sputtering on the opposite surfaces of the dielectric layer, respectively, and which have little defect.Other References
Field of SearchElectric communication system containing transmitter or receiver of pulse, digital, or electromagnetic radio, television, or radar wave formHigh frequency waveguides, resonators, electrical networks, or other devices of the waveguide type (e.g., phase shifters, cavity filters, etc.) Superconductor next to layer containing nonsuperconducting ceramic composition or inorganic compound (e.g., metal oxide, metal nitride, etc.) Sputtering Sputter coating Electric superconducting Superconductor |
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