Compact excimer laser
Excimer laser with magnetic bearings supporting fan Patent #: 5848089
ApplicationNo. 290852 filed on 04/13/1999
US Classes:372/37, HAVING AN APPLIED MAGNETIC FIELD372/57, Excimer or exciplex372/61, Discharge tube feature372/65Support
ExaminersPrimary: Scott, Leon Jr.
Attorney, Agent or Firm
International ClassH01S 003/00
AbstractAn electric discharge gas laser having a laser cavity in which is contained a laser gas and a fan for circulating the laser gas. The fan is supported in position radially by a roller bearing system and axially at least in part by magnetic forces. In a preferred embodiment the magnetic forces are supplied by a brushless DC motor in which the rotor of the motor is sealed within the gas environment of the laser cavity and the motor stator is located outside the gas environment. The magnetic center of the rotor is offset from the center of the stator to produce a magnetic reluctance generated force on the shaft that acts axially on the shaft toward the non-drive end and is reacted by a ball and plate bearing assembly mounted along the axis of rotation at the opposite end of the shaft.