Very narrow band laser Patent #: 5856991
ApplicationNo. 273446 filed on 03/19/1999
US Classes:372/25, Control of pulse characteristics372/34, PARTICULAR TEMPERATURE CONTROL372/37, HAVING AN APPLIED MAGNETIC FIELD372/38.04, Power supply372/38.05, Electrode372/58, With means for controlling gas flow372/60, Including a specified gas additive372/82, Inductive or capactive excitation372/86, Having an auxiliary ionization means372/87, Having particular electrode structure372/92, PARTICULAR RESONANT CAVITY372/102Grating
ExaminersPrimary: Scott, Leon Jr.
Attorney, Agent or Firm
International ClassH01S 003/10
AbstractThe present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses in the range of 1000 Hz to 2000 Hz or greater. Replaceable modules include a laser chamber; a pulse power system comprised of three modules; an optical resonator comprised of a line narrowing module and an output coupler module; a wavemeter module, an electrical control module, a cooling water module and a gas control module. Important improvements have been provided in the pulse power unit to produce faster rise time and improved pulse energy control. These improvements include an increased capacity high voltage power supply with a voltage bleed-down circuit for precise voltage trimming, an improved commutation module that generates a high voltage pulse from the capacitors charged by the high voltage power supply and amplifies the pulse voltage 23 times with a very fast voltage transformer having a secondary winding consisting of a single four-segment stainless steel rod. A novel design for the compression head saturable inductor greatly reduces the quantity of transformer oil required and virtually eliminates the possibility of oil leakage which in the past has posed a hazard.
Field of SearchPARTICULAR RESONANT CAVITY
With means for controlling gas flow
Having an auxiliary ionization means
Having particular electrode structure
PARTICULAR TEMPERATURE CONTROL
Inductive or capactive excitation
HAVING AN APPLIED MAGNETIC FIELD
Including a specified gas additive
PARTICULAR OPERATING COMPENSATION MEANS