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US Patent 5975126 - Method and apparatus for detecting and controlling mass flow

US Patent Issued on November 2, 1999
Estimated Patent Expiration Date: Icon_subject December 1, 2018Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
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Abstract

A process mass flow instrument for measuring the mass flow rate of a process fluid including a fluid inlet, a fluid outlet, a flow passage connecting the fluid inlet and the fluid outlet, a fluid flow sensor which provides a raw output signal corresponding to an unknown mass flow rate and a processor which contains an empirically derived conversion routine for converting the raw output signal to an adjusted signal indicating the mass flow rate of the process fluid. A method for determining an unknown mass flow using an empirically derived conversion function, the function being derived by correlating the output signals of a mass flow instrument sensing the flow of a calibration fluid with the output signals of the mass flow instrument sensing the flow of the process fluid.

Other References

  • Sheriff, D., "Mass Flow Controller Features Digital Calibration," Solid State Technology, vol. 36, No. 2, pp. 33-34, 36, Feb. 1993
  • Drexel, C.F., "Digital Mass Flow Controller," Solid State Technology, vol. 36, No. 6, pp. 73 and 75, Jun. 1993
  • "Sensors Offer Fast Response Times-Thermal Mass-Flow Transducers," EDN Electrical Design News, vol. 34, No. 11, pp. 55, 57-58, 60, 62, 64, 66, 68, May 198

Inventors

Application

No. 203151 filed on 12/01/1998

US Classes:

137/487.5, Electrically actuated valve137/486Responsive to change in rate of fluid flow

Field of Search

137/487.5, Electrically actuated valve137/486, Responsive to change in rate of fluid flow73/861, VOLUME OR RATE OF FLOW73/204.15, Including detail of feedback or rebalancing circuitry73/204.16By control of a separate heating or cooling element

Examiners

Primary: Ferensic, Denise L.
Assistant: Kim, Joanne Y.

Attorney, Agent or Firm

US Patent References

4203465, Precision pressure control valve
Issued on: 05/20/1980
Inventor: Rissi
4253156, Automatic flowmeter calibration system
Issued on: 02/24/1981
Inventor: Lisle ,   et al.
4718443, Mass flowmeter apparatus
Issued on: 01/12/1988
Inventor: Adney ,   et al.
4858643, Fluid flow stabilizing apparatus
Issued on: 08/22/1989
Inventor: Vavra ,   et al.
4918995, Electronic gas meter
Issued on: 04/24/1990
Inventor: Pearman, et al.
5003810, Fluid meter
Issued on: 04/02/1991
Inventor: Jepson, et al.
5062446, Intelligent mass flow controller
Issued on: 11/05/1991
Inventor: Anderson
5129418, Mass flow controller with supplemental condition sensors
Issued on: 07/14/1992
Inventor: Shimomura, et al.
5159951, Mass flow controller
Issued on: 11/03/1992
Inventor: Ono, et al.
5285673, Method for in-line calibration verification of mass flow meters
Issued on: 02/15/1994
Inventor: Drexel, et al.
5311762, Flow sensor calibration
Issued on: 05/17/1994
Inventor: Drexel
5325705, In-line detector system for real-time determination of impurity concentration in a flowing gas stream
Issued on: 07/05/1994
Inventor: Tom
5359878, Apparatus and method for in-line calibration verification of mass flow meters
Issued on: 11/01/1994
Inventor: Mudd
5445035, Precision gas mass flow measurement apparatus and method maintaining constant fluid temperature in thin elongated flow path
Issued on: 08/29/1995
Inventor: Delajoud
5583282, Differential gas sensing in-line monitoring system
Issued on: 12/10/1996
Inventor: Tom
5730181Mass flow controller with vertical purifier
Issued on: 03/24/1998
Inventor: Doyle, et al.

Foreign Patent References

  • 0 468 793 A2 EP 01/18/1992
  • 0 689 040 A2 EP 12/18/1995
  • 87/00267 WO 01/18/1987

International Class

F16K 031/12

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