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Method and apparatus for detecting and controlling mass flow

Patent 5975126 Issued on November 2, 1999. Estimated Expiration Date: Icon_subject December 1, 2018. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

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Intelligent mass flow controller
Patent #: 5062446
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Patent #: 5129418
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Mass flow controller
Patent #: 5159951
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Method for in-line calibration verification of mass flow meters
Patent #: 5285673
Issued on: 02/15/1994
Inventor: Drexel, et al.

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Inventors

Application

No. 203151 filed on 12/01/1998

US Classes:

137/487.5, Electrically actuated valve137/486Responsive to change in rate of fluid flow

Examiners

Primary: Ferensic, Denise L.
Assistant: Kim, Joanne Y.

Attorney, Agent or Firm

Foreign Patent References

  • 0 468 793 A2 EP 01/12/1992
  • 0 689 040 A2 EP 12/12/1995
  • 87/00267 WO 01/12/1987

International Class

F16K 031/12

Abstract

A process mass flow instrument for measuring the mass flow rate of a process fluid including a fluid inlet, a fluid outlet, a flow passage connecting the fluid inlet and the fluid outlet, a fluid flow sensor which provides a raw output signal corresponding to an unknown mass flow rate and a processor which contains an empirically derived conversion routine for converting the raw output signal to an adjusted signal indicating the mass flow rate of the process fluid. A method for determining an unknown mass flow using an empirically derived conversion function, the function being derived by correlating the output signals of a mass flow instrument sensing the flow of a calibration fluid with the output signals of the mass flow instrument sensing the flow of the process fluid.

Other References

  • Sheriff, D., "Mass Flow Controller Features Digital Calibration," Solid State Technology, vol. 36, No. 2, pp. 33-34, 36, Feb. 1993
  • Drexel, C.F., "Digital Mass Flow Controller," Solid State Technology, vol. 36, No. 6, pp. 73 and 75, Jun. 1993
  • "Sensors Offer Fast Response Times-Thermal Mass-Flow Transducers," EDN Electrical Design News, vol. 34, No. 11, pp. 55, 57-58, 60, 62, 64, 66, 68, May 198
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