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Method and apparatus for measuring electrical noise in devices

Patent 5970429 Issued on October 19, 1999. Estimated Expiration Date: Icon_subject August 8, 2017. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

Method of measuring FET noise parameters
Patent #: 4908570
Issued on: 03/13/1990
Inventor: Gupta, et al.

Measuring integrity of semiconductor multi-layer metal structures
Patent #: 5049811
Issued on: 09/17/1991
Inventor: Dreyer, et al.

Method for reliability testing integrated circuit metal films
Patent #: 5057441
Issued on: 10/15/1991
Inventor: Gutt, et al.

Method for detecting defects in semiconductor insulators
Patent #: 5648275
Issued on: 07/15/1997
Inventor: Smayling, et al.

Method for detecting defects in semiconductor insulators Patent #: 5798649
Issued on: 08/25/1998
Inventor: Smayling, et al.

Inventor

Application

No. 907760 filed on 08/08/1997

US Classes:

702/65, Including related electrical parameter324/613, Noise702/57Electrical signal parameter measurement system

Examiners

Primary: Assouad, Patrick

International Class

G01R 029/26

Abstract

A method and apparatus for measuring electrical noise in devices is disclosed that comprises two distinct measurement phases. In one phase, the differential output resistance, rab, between a first terminal, a, and a second terminal, b, of the device under test is measured. In the second phase, a voltage, VL (t), is measured across a load resistance, RL, that is in series with the first terminal, a, of the device under test. Then the output voltage noise spectral density, SVL, is determined based on a fourier transform of the voltage, VL (t); and the output current noise spectral density, Sia, is determined based on the output voltage noise spectral density, SVL, the load resistance, RL, and the differential output resistance, rab.

Other References

  • Berkeley Technology Associates "NoisePro" and "BTA9603" Product Brochure--pp. 2-4 in particular.(Dec. 1996)
  • Luo, "Measurement and Extraction for Parameters of Noise in Bipolar Transistors Based on Measuring the Power Spectral Density of Noise Current", IEEE, 1993
  • Macucci et al., "Very Sensitive Measurement Method of Electron Device Current Noise", IEEE, 1991
  • Chaar et al., "Low-Frequency Noise Measurements on Semiconductor Devices Using a Probe Station", IEEE, 199
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