U.S. patents available from 1976 to present.
U.S. patent applications available from 2005 to present.

Temperature measuring device

Patent 5969639 Issued on October 19, 1999. Estimated Expiration Date: Icon_subject July 28, 2017. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

Re32369

Method for use of color and selective highlighting to indicate patient critical events in a centralized patient monitoring system Patent #: 5262944
Issued on: 11/16/1993
Inventor: Weisner, et al.

Inventors

Application

No. 901708 filed on 07/28/1997

US Classes:

340/870.17, Temperature342/368Including a steerable array

Examiners

Primary: Horabik, Michael
Assistant: Wong, Albert K.

International Class

H01Q 003/26

Abstract

Systems and methods are described for a wireless instrumented silicon wafer that can measure temperatures at various points and transmit those temperature readings to an external receiver. The device has particular utility in the processing of semiconductor wafers, where it can be used to map thermal uniformity on hot plates, cold plates, spin bowl chucks, etc. without the inconvenience of wires or the inevitable thermal perturbations attendant with them.

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