Patent References Re32369 Method for use of color and selective highlighting to indicate patient critical events in a centralized patient monitoring system Patent #: 5262944 InventorsApplicationNo. 901708 filed on 07/28/1997US Classes:340/870.17, Temperature342/368Including a steerable arrayExaminersPrimary: Horabik, MichaelAssistant: Wong, Albert K. International ClassH01Q 003/26AbstractSystems and methods are described for a wireless instrumented silicon wafer that can measure temperatures at various points and transmit those temperature readings to an external receiver. The device has particular utility in the processing of semiconductor wafers, where it can be used to map thermal uniformity on hot plates, cold plates, spin bowl chucks, etc. without the inconvenience of wires or the inevitable thermal perturbations attendant with them. | |