Semi-insulating aluminum nitride sintered body

Patent 5958813 Issued on September 28, 1999. Estimated Expiration Date:

November 25, 2017. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Abstract Claims Description Full Text

Patent References

Thin film magnetic head slider
Patent #: 4639803
Issued on: 01/27/1987
Inventor: Takeda , et al.

Process for producing aluminum nitride sintered body with high thermal conductivity
Patent #: 4997798
Issued on: 03/05/1991
Inventor: Okuno, et al.

Heat-conductive aluminum nitride sintered body and method of manufacturing the same
Patent #: 5034357
Issued on: 07/23/1991
Inventor: Yamakawa, et al.

Aluminum nitride sintered body and process for producing the same
Patent #: 5312786
Issued on: 05/17/1994
Inventor: Yamakawa, et al.

Electrostatic chuck
Patent #: 5413360
Issued on: 05/09/1995
Inventor: Atari, et al.

Ceramic armor Patent #: 5443917
Issued on: 08/22/1995
Inventor: Tarry

Inventors

Assignee

Kyocera Corporation

Application

No. 978067 filed on 11/25/1997

US Classes:

501/98.4, Aluminum nitride containing (AIN)279/128, WITH MAGNETIC OR ELECTROSTATIC MEANS501/98.6Composites (continuous matrix with dispersed phase)

Examiners

Primary: Marcheschi, Michael

Attorney, Agent or Firm

Loeb & Loeb LLP

International Classes

C04B 035/581
B23Q 003/15

Foreign Application Priority Data

1996-11-26 JP

Abstract

The semi-insulating aluminum nitride sintered body of this invention is composed of aluminum nitride particles, electroconductive fine particles having a volume inherent resistivity value of not larger than 102 Ω⋅cm which are dispersed among the aluminum nitride particles and an intergranular phase formed from an oxide containing at least one element selected from the group consisting of Ti, Ce, Ni, Ta, Y, Er and Yb, or from Si. This sintered body has a volume inherent resistivity value of 104 to 1011 Ω⋅cm, and is very useful, for example, as a member for removing static electricity, or a dielectric layer of an electrostatic chuck. Since dispersions of volume inherent resistivity values are very small, a material having a volume inherent resistivity value within a certain range can be produced with good reproducibility. Accordingly, the yield is high, and the productivity is very good.