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US Patent 5948470 - Method of nanoscale patterning and products made thereby

US Patent Issued on September 7, 1999
Estimated Patent Expiration Date: Icon_subject April 22, 2018Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
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Abstract

Methods of nanometer pattern formation and transfer onto a selected substrate are provided wherein a selected block copolymer is coated onto the selected substrate and a component of the block copolymer is chemically modified or physically removed so that the dense periodic pattern of the block copolymer can be transferred onto the selected substrate. Substrates prepared by these methods are also provided.

Other References

  • Chou, S., "Single-domain magnetic pillar array of 35 nm diameter and65 Gbits/in.2 density for ultrahigh density quantum magnetic storage", J. Appl. Physics 1994 76:6673
  • Douglas et al., "Transfer of Biologically Derived Nanometer-Scale Patterns to Smooth Substrates", Science 1992 257:642
  • Kryder, M.H., "Magnetic thin films for data storage", Thin Solid Films 1992 216:174
  • Tonucci et al., "Nonochannel Array Glass", Science 1992 258:738
  • Volkmuth, W.D. and Austin, R.P.H., "DNA electrophoresis in microlithographic arrays", Nature 1992 358:600 199

Inventors

Application

No. 064274 filed on 04/22/1998

US Classes:

427/198, Deforming the base or coating or removing part of the coating257/E21.035, Characterized by their composition, e.g., multilayer masks, materials (EPO)257/E21.257, Using mask (EPO)427/430.1IMMERSION OR PARTIAL IMMERSION

Field of Search

156/60, Surface bonding and/or assembly therefor427/180, SOLID PARTICLES OR FIBERS APPLIED427/183, Rotating the base427/189, Uniting particles to form continuous coating with nondiscernible particles427/195, Synthetic resin particles427/197, Localized different areas produced (e.g., printing, etc.)427/198, Deforming the base or coating or removing part of the coating427/220, Organic coating427/221, Resin, rubber, or hardenable oil containing coating427/272, Mask or stencil utilized427/282, Mask or stencil utilized427/430.1IMMERSION OR PARTIAL IMMERSION

Examiners

Primary: Dixon, Merrick

Attorney, Agent or Firm

US Patent References

4407695, Natural lithographic fabrication of microstructures over large areas
Issued on: 10/04/1983
Inventor: Deckman ,   et al.
4512848, Procedure for fabrication of microstructures over large areas using physical replication
Issued on: 04/23/1985
Inventor: Deckman ,   et al.
4801476Method for production of large area 2-dimensional arrays of close packed colloidal particles
Issued on: 01/31/1989
Inventor: Dunsmuir ,   et al.

International Classes

B05D 005/00
660
667
659
656

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