Method and apparatus for surface inspection in a chamber

Patent 5940175 Issued on August 17, 1999. Estimated Expiration Date:

November 1, 2016. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Abstract Claims Description Full Text

Patent References

3790287

Detection of blemishes in surfaces
Patent #: 3931525
Issued on: 01/06/1976
Inventor: Clarke

Linear integrating cavity light collector
Patent #: 4321630
Issued on: 03/23/1982
Inventor: Kramer

Scanning contaminant and defect detector
Patent #: 4378159
Issued on: 03/29/1983
Inventor: Galbraith

System for checking defects on a flat surface of an object
Patent #: 4508450
Issued on: 04/02/1985
Inventor: Ohshima , et al.

Multistep planarized chemical vapor deposition process with the use of low melting inorganic material for flowing while depositing
Patent #: 4962063
Issued on: 10/09/1990
Inventor: Maydan, et al.

Particle detection on a patterned or bare wafer surface
Patent #: 5076692
Issued on: 12/31/1991
Inventor: Neukermans, et al.

Position location in surface scanning using interval timing between scan marks on test wafers
Patent #: 5083035
Issued on: 01/21/1992
Inventor: Pecen, et al.

High speed wafer handling method
Patent #: 5176493
Issued on: 01/05/1993
Inventor: Toro-Lira, et al.

Particle detector for rough surfaces
Patent #: 5189481
Issued on: 02/23/1993
Inventor: Jann, et al.

More ...

Inventor

Sun, James J.

Assignee

MSP Corporation

Application

No. 742448 filed on 11/01/1996

US Classes:

356/237.3Detection of object or particle on surface

Examiners

Primary: Hantis, K. P.

Attorney, Agent or Firm

Westman, Champlin & Kelly, P.A.

International Class

G01N 021/00

Abstract

An inspection system for inspecting products that have a flat, reflective surface, such as a wafer or a flat panel display on which a thin film is to be deposited, includes an inspection chamber connected to a processing chamber with both of the chambers being under vacuum. The inspection equipment performs the inspection with the product in the inspection chamber without removing the product from the vacuum environment. In a preferred form of the invention, the inspection chamber includes a wall portion that will transmit light, and the inspection equipment is a laser source directed to the reflective surface of the product and a receiver for receiving reflected light to determine changes in the character of the surface caused by the deposited film or by imperfections, haze or particles.