Optical apparatus for determining the height and tilt of a sample surface
October 29, 2017. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References Re35350 Position detecting system Method and system for determining surface profile information Optical apparatus for the detection of position Method and arrangement for aligning, examining and/or measuring two-dimensional objects Optical position detecting method and apparatus therefor Automatic leveling system and a method of leveling a workpiece based on focus detection Method for scanning a plurality of optical measuring reflectors and an apparatus for performing the method Optical device determining the position and orientation of an object, and optical recording and/or reproducing apparatus including the device Optical head with a tilt correction servo mechanism InventorApplicationNo. 960280 filed on 10/29/1997US Classes:356/138, ANGLE MEASURING OR ANGULAR AXIAL ALIGNMENT250/559.29, Measuring position356/622Position of detected arrangement relative to projected beamExaminersPrimary: Kim, Robert H.Assistant: Smith, Zandra V. Attorney, Agent or FirmInternational ClassG01B 011/14AbstractA device is provided for determining the height and/or tilt of local features on the surface of a sample. The device includes a laser projecting a collimated beam at an oblique angle at a reflection point on the sample surface and a converging lens having an optical axis extending at an angle of reflection equal to the angle of incidence from the reflection point. The focusing characteristics of the lens are used to separate the deflection of the reflected collimated beam due to tilt of the surface from such deflection due to linear displacement of the surface. | |
