Patent ReferencesCompound semiconductor integrated circuit device Integrated circuit composed of group III-V compound field effect and bipolar semiconductors Method for producing integrated quasi-complementary bipolar transistors and field effect transistors Semiconductor device Fabrication of vertical SiGe base HBT with lateral collector contact on thin SOI Patent #: 5583059 InventorsAssigneeApplicationNo. 900698 filed on 07/25/1997US Classes:257/192, Field effect transistor257/194, Doping on side of heterojunction with lower carrier affinity (e.g., high electron mobility transistor (HEMT))257/195, Combined with diverse type device257/197, Bipolar transistor257/198, Wide band gap emitter257/E21.695, Combination of bipolar and field-effect technologies (EPO)257/E27.015, In combination with bipolar transistor (EPO)257/E29.193, Comprising lattice mismatched active layers (e.g., SiGe strained layer transistors) (EPO)257/E29.315With heterojunction gate (e.g., transistors with semiconductor layer acting as gate insulating layer) (EPO)ExaminersPrimary: Mintel, WilliamAttorney, Agent or FirmInternational ClassesH01L 031/032.8H01L 031/033.6 H01L 031/072 H01L 031/109 Foreign Application Priority Data1996-07-26 JPAbstractA semiconductor device includes a heterojunction bipolar transistor and a junction gate type field effect transistor which are formed on a semiconductor base. A base region and graft base regions of the heterojunction bipolar transistor, and a channel region and source/drain regions of the junction gate type field effect transistor, are formed of a first semiconductor layer of a first conduction type. The first semiconductor layer is formed of mixed crystals of silicon-germanium which has a higher carrier mobility than silicon. An emitter region of the heterojunction bipolar transistor and a gate region of the junction gate type field effect transistor are formed of a second semiconductor layer of a second conduction type which makes a heterojunction with the first semiconductor layer. | |