Thermal mass flowmeter and mass flow controller, flowmetering system and method
October 4, 2016. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesAutomatic flowmeter calibration system Electronically controlled flow meter and flow control system Device for controlling the flowrate of a fluidmore particularly a radioactive fluid Variable gas volume flow measuring and control methods and apparatus Electronic gas meter Fluid meter Intelligent mass flow controller Mass flow controller with supplemental condition sensors Method for in-line calibration verification of mass flow meters Flow sensor calibration InventorsApplicationNo. 725859 filed on 10/04/1996US Classes:137/487.5, Electrically actuated valve73/204.15, Including detail of feedback or rebalancing circuitry137/486Responsive to change in rate of fluid flowExaminersPrimary: Ferensic, Denise L.Assistant: Kim, Joanne Y. Attorney, Agent or FirmForeign Patent References
International ClassF16K 031/12AbstractA flowmeter (100) or mass flow controller (101) used in a manufacturing process with toxic and reactive process fluids. A fluid flow sensor (114) senses fluid flow. A set point is established based upon predetermined temperature and pressure conditions at which the fluid will be utilized in the process. A valve drive (124) operates a fluid flow valve (126) to the resulting fluid flow rate, this being based upon the sensed flow rate and the set point. A control unit (122) controls the valve drive. The control unit accesses a calibration data set to determine the amount of fluid to be delivered by the fluid flow valve based upon the sensed flow rate and the set point. This calibration data set is created for the controller over its operational range using a calibration fluid having similar thermodynamic transport properties to a process fluid. The instrument is calibrated using the calibration fluid and the data set is produced by converting the calibration data using process fluid data stored in a data base (200). Accessing the data set stored in the instrument together with routing signals over a communication network (300) permits the instrument to precisely control process fluids without having to introduce external correction factors or other adjustments to the process.Other References
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