Micro-electromechanical (MEM) optical resonator and method
Patent 5903380 Issued on May 11, 1999. Estimated Expiration Date: 
May 1, 2017. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
May 1, 2017. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesTwo-dimensional laser beam scanner using PVDF bimorph Two-dimensional optical scanner Patent #: 5579148 InventorsAssigneeApplicationNo. 847018 filed on 05/01/1997US Classes:359/224, Reflective element moved by deformable support359/202, X-Y scanner359/223By moving a reflective elementExaminersPrimary: Phan, JamesAttorney, Agent or FirmInternational ClassG02B 26//08AbstractAn integrated micro-electromechanical (MEM) optical resonator comprises a cantilever beam which is fixed to a substrate at one end and extends freely over the substrate at the other end, and a bimorph actuator stacked atop the beam at its fixed end. A reflective surface partially covers the top of the beam at its free end. The bimorph actuator comprises material layers having different thermal expansion coefficients. A DC-biased AC voltage connected across the actuator causes it to heat and cool as the current passing through it increases and decreases, creating a thermal bimorph effect which causes the cantilever beam and the reflective surface to oscillate in accordance with the varying current, preferably at the beam and actuator structure's fundamental resonant frequency. Combining the resonator with a light source and actuator excitation circuitry creates an optical scanner engine which delivers a scan angle in excess of 20 degrees and a scan rate of up to 2000 Hz, using a driving voltage of only 2 Vp-p.Other References
Field of SearchDEFLECTION USING A MOVING ELEMENT OR MEDIUM (OFFSETTING OR CHANGING AT LEAST A PORTION OF THE BEAM)Using a periodically moving element (periodic change of optically reflecting, refracting or diffracting element) Particular mount or driver for element Including reflective type moving element Having oscillating element Single plane mirror element By moving a reflective element Reflective element moved by deformable support By changing physical characteristics (e.g., shape, size or contours) of an optical element Shape or contour of light control surface altered Having multiple electrodes Particular oscillating driver Piezoelectric slab having different resonant frequencies at different areas With mechanical energy coupling means Bending type Plural elements Multimorph Electrode arrangement More than two | |
