Valved coupling for ultra high purtiy gas distribution system
Patent 5863023 Issued on January 26, 1999. Estimated Expiration Date: 
September 4, 2017. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
September 4, 2017. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesInventorsAssigneeApplicationNo. 923476 filed on 09/04/1997US Classes:251/63.5, Coaxial actuator, seat and valve137/614.21, Coaxial oppositely directed seats251/61.2, Coaxial actuator, seat and valve251/335.2DiaphragmExaminersPrimary: Lee, KevinAttorney, Agent or FirmInternational ClassF16K 031/126AbstractValved couplers and gas processing components particularly suitable for ultra-high purity gas distribution for use in semiconductor manufacturing. In the couplers, a valve stem/bullnose seals the aperture of the coupler immediately adjacent the exterior of the coupler, so that only a minimal amount of the wetted surface of the coupler is exposed to the external environment. A gas processing component (e.g., a filter), or an entire integrated gas stick assembly, may be sealed from the exterior environment at both its inlet and outlet sides, by these valved couplers. As a result, the entire device can be purged after manufacture and left in a controlled environment during shipment and installation, reducing the need for purging after installation.Field of SearchCoaxial actuator, seat and valveCoaxial actuator, seat and valve Flexible wall expansible chamber reciprocating valve actuator Actuator wall between valve and coaxial spring biasing means Piston type expansible chamber reciprocating valve actuator Coaxial spring biasing means between valve and actuator Coaxial oppositely directed seats One valve head carries other valve head | |
