Patent ReferencesMethod for delivering an involatile reagent in vapor form to a CVD reactor Patent #: 5204314 InventorsAssigneeApplicationNo. 736668 filed on 10/25/1996US Classes:427/162, OPTICAL ELEMENT PRODUCED427/167, Silicon compound coating (e.g., quartz, etc.)427/248.1, COATING BY VAPOR, GAS, OR SMOKE427/255.6, Organic coating applied by vapor, gas, or smoke427/294VACUUM UTILIZED PRIOR TO OR DURING COATINGExaminersPrimary: Beck, ShriveAssistant: Meeks, Timothy Attorney, Agent or FirmForeign Patent References
International ClassC23C 016/24Foreign Application Priority Data1995-10-26 DEAbstractThe invention relates to a material for and method of preparing water-repellent coatings on optical substrates. Compounds of formula ICn F2n+1 --(CH2)m --Si(R1 R2 R3)(I)in whichR1 is alkoxy having 1 to 3 carbon atoms or isCn F2n+1 --(CH2)m --Si(R2 R3)--O--,R2 and R3 are alkyl or alkoxy having 1 to 3 carbon atoms,n is 1 to 12; andm is 1 to 6,are applied to the substrates by thermal vapor coating in a high vacuum. | |