Micromechanical display logic and array
Light modulation device with matrix addressing
Architecture and process for integrating DMD with control circuit substrates
Method and apparatus for modulating a light beam
Active yoke hidden hinge digital micromirror device Patent #: 5535047
AbstractA spatial light modulator, comprised of an upper and a lower substrate. One or more electrostatically deflectable mirrors are suspended by torsion hinges from an optically transmissive upper substrate. The upper substrate is held above the lower substrate containing electronic circuitry. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. An aperture layer is built into the upper substrate to enable light to reach only the flat mirror surfaces.