Patent References 2439466 2486968 2759241 Stabilized surface wave device Oxygen-plasma passivated and low scatter acoustic wave devices Monolithic crystal filter Piezoelectric device Packaged piezoelectric oscillator incorporating capacitors and method of making the same Patent #: 5502344 InventorsApplicationNo. 869222 filed on 06/04/1997US Classes:310/340, Encapsulated or coated310/312, Adding or subtracting mass310/344, Sealed unit310/348, With mounting or support means310/364MultilayerExaminersPrimary: Budd, Mark O.Attorney, Agent or FirmForeign Patent References
International ClassH01L 041/08Foreign Application Priority Data1994-06-17 JPAbstractA resonator device having an insulating substrate, a strip-shaped vibrating element which is mounted on said insulating substrate and is provided with driving electrodes formed on the main opposing surfaces of a piezoelectric substrate, and terminal electrodes which are provided on said insulating substrate so as to be electrically connected with said driving electrodes and to which driving signals are applied by an external signal source. At least the longitudinal side portions of said vibrating element are coated with a surface active agent. With such a constitution, fluctuations in resonant resistance which are due to the excitation level can be suppressed, thereby contributing to the stable operation of the device, reducing the number of producing steps, and raising the yield rate in production. | |