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Dynamic lot dispatching required turn rate factory control system and method of operation thereof

Patent 5818716 Issued on October 6, 1998. Estimated Expiration Date: Icon_subject October 18, 2016. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

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Inventors

Application

No. 735059 filed on 10/18/1996

US Classes:

700/100, Job scheduling257/E21.525, Procedures, i.e., sequence of activities consisting of plurality of measurement and correction, marking or sorting steps (EPO)700/121Integrated circuit production or semiconductor fabrication

Examiners

Primary: Voeltz, Emanuel T.
Assistant: Musgrove, Richard H.

Attorney, Agent or Firm

International Class

G06F 019/00

Abstract

In a semiconductor manufacturing fabrication plant with production to-order type operation, hundreds of devices and various processes are managed. To provide short cycle time and precise delivery to satisfy customer expectations is a major task. A dispatching algorithm named "Required Turn Rate (RTR)" functions according to the level of current wafers in process (WIP) algorithm revising the due date for every lot to satisfy the demand from Master Production Scheduling (MPS). Further the RTR algorithm calculates the RTR of each lot based on process flow to fulfill the delivery requirement. The RTR algorithm determines not only due date and production priority of each lot, but also provides RTR for local dispatching. The local dispatching systems of each working area dispatch the lots by using required turn rate to maximize output and machines utilization.

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