Electron microscope with raman spectroscopy
August 12, 2016. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 3624393 Method and apparatus for light-induced scanning-microscope display of specimen parameters and of their distribution Scanning electron microscope with an optical microscope Near field scanning optical microscopy Cathodoluminescence system for use in a scanning electron microscope including means for controlling optical fiber aperture Scanning microscope, scanning width detecting device, and magnification indicating apparatus Near field scanning optical microscope having a tapered waveguide Environmental scanning electron microscope Environmental scanning electron microscope Variable temperature near-field optical microscope Patent #: 5473157 InventorsAssigneeApplicationNo. 682601 filed on 08/12/1996US Classes:250/311, Electron microscope type250/310, Electron probe type250/397With detectorExaminersPrimary: Anderson, Bruce C.Attorney, Agent or FirmForeign Patent References
International ClassH01J 037/244Foreign Application Priority Data1994-01-24 NLAbstractElectron microscope provided, in the direction of the longitudinal axis, with at least one electron beam generation system, a condenser and objective lens system, a specimen chamber with a specimen mount, a projection lens system with imaging screen for the purpose of transmission electron microscopy (TEM) and/or an electron detector for the purpose of scanning electron microscopy (SEM) . The microscope is used in combination with an externally positioned Raman spectrometer and an associated light source for injecting and extracting, via a window in the microscope wall, a light beam to be directed at the specimen, and specimen-related Raman radiation, respectively. In the specimen chamber, a light beam and Raman radiation guide system is provided with an optical guide to guide the light beam to--and the Raman radiation from--the specimen. The guide system and the specimen mount are displaceable with respect to one another for mutual alignment of the specimen and the optical axis of the Raman spectrometer. | |
