Ultra high purity gas distribution component with integral valved coupling and methods for its use
Patent 5810031 Issued on September 22, 1998. Estimated Expiration Date: 
February 21, 2016. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
February 21, 2016. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesInventorsAssigneeApplicationNo. 604451 filed on 02/21/1996US Classes:137/557, Fluid pressure responsive indicator, recorder or alarm137/269, CONVERTIBLE137/545, Plural separating elements137/614.21Coaxial oppositely directed seatsExaminersPrimary: Chambers, A. MichaelAttorney, Agent or FirmForeign Patent References
International ClassF16K 031/122AbstractValved couplers and gas processing components particularly suitable for ultra-high purity gas distribution for use in semiconductor manufacturing. In the couplers, a valve stem/bullnose seals the aperture of the coupler immediately adjacent the exterior of the coupler, so that only a minimal amount of the wetted surface of the coupler is exposed to the external environment. A gas processing component (e.g., a filter), or an entire integrated gas stick assembly, may be sealed from the exterior environment at both its inlet and outlet sides, by these valved couplers. As a result, the entire device can be purged after manufacture and left in a controlled environment during shipment and installation, reducing the need for purging after installation. | |
