Patent ReferencesDifferentially pumped temperature controller for low pressure thin film fabrication process Method of controlling temperature of susceptor Thermal cycler for automatic performance of the polymerase chain reaction with close temperature control Patent #: 5602756 InventorsAssigneeApplicationNo. 903716 filed on 07/31/1997US Classes:62/3.7, Including specific circuitry or heat exchanger material62/3.3, Heat pump, selective heating and cooling118/724, By means to heat or cool165/206, Nonbuilding system (e.g., machine tool, chemical analyzer, etc.)392/416, With chamber392/418With support for workpieceExaminersPrimary: Sollecito, John M.Attorney, Agent or FirmInternational ClassF25B 021/02AbstractA thermal cycling module includes an array of thermoelectric devices 36! divided into multiple zones A, B, C, D! independently controlled by corresponding variable power supplies 56, 58, 60, 62!. The thermoelectric devices 36! provide localized, precise, and rapid control of both heating and cooling, while fluid from one of several fluid supplies 64, 66, 68! provides bulk heating or cooling via a fluid heat exchanger 38!. Sensors 46, 48, 50, 52! provide feedback of temperature or other process parameters to a controller 54! which generates control signals for controlling the power supplies 56, 58, 60, 62!, the fluid supplies 64, 66, 68!, and fluid valves 70, 72! which control fluid flow through the heat exchanger 38!.Field of SearchThermoelectric; e.g., peltier effectHeat pump, selective heating and cooling Including specific circuitry or heat exchanger material Of external fluid or means Plural external fluids or means controlled External fluid and refrigeration producer COMBINED Nonbuilding system (e.g., machine tool, chemical analyzer, etc.) By means to heat or cool Substrate heater Muffle-type enclosure Including heat energy reflecting or directing means With infrared generating means With support for workpiece With chamber | |