Patent References 3921022 Method for monitoring microhole growth during production of microholes having a predetermined diameter Microelectronic field ionizer and method of fabricating the same Method of producing carbon material by bending at least one carbon atom layer of graphite Patent #: 5626812 InventorsAssigneeApplicationNo. 799767 filed on 02/12/1997US Classes:250/423F, Field ionization type204/192.11, Ion beam sputter deposition204/298.04, Ion beam sputter deposition250/492.3Ion or electron beam irradiationExaminersPrimary: Nguyen, Hiep T.Attorney, Agent or FirmInternational ClassH01J 027/02Foreign Application Priority Data1996-02-13 JPAbstractA composite material is produced by irradiating a surface of a shaped body of a carbonaceous material with an ion beam to form a layer of carbon nanotubes on the surface. The composite material is useful as a cathode of an electron beam source element.Other References
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