Wafer carrier and method
Reinforced carrier with embedded rigid insert
Vertical boat and a method for making the same
Vertical boat for holding semiconductor wafers
Wafer installing cassette for semiconductor manufacturing apparatus Patent #: 5577621
ApplicationNo. 795410 filed on 02/05/1997
US Classes:211/41.18, Semiconductor wafer118/500, WORK HOLDERS, OR HANDLING DEVICES206/454Fragile or sensitive (e.g., glass mirror)
ExaminersPrimary: Gibson, Robert W. Jr.
Attorney, Agent or Firm
International ClassA47F 007/00
Foreign Application Priority Data1996-02-06 JP
AbstractA wafer boat includes a plurality of rods arranged substantially parallel to each other at regular intervals. A plurality of ring members are attached to the rods at regular intervals in a longitudinal direction of the rods. A plurality of supporting pieces are attached to each of the ring members. Each of the supporting pieces extends upward from an upper surface portion of each of the ring members and is bent radially inward of the ring member. The supporting pieces of each of the ring members are brought into contact with an edge portions of a lower surface of the wafer to support the wafer. Further, a plurality of convex portions are formed at inner peripheral edge portions of each of the ring members between each pair of adjacent ones of the rods, and extend radially inward of the ring member.