Wafer boat
Patent 5752609 Issued on May 19, 1998. Estimated Expiration Date: 
February 5, 2017. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
February 5, 2017. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesWafer carrier and method Reinforced carrier with embedded rigid insert Wafer jig Vertical boat and a method for making the same Vertical boat for holding semiconductor wafers Wafer installing cassette for semiconductor manufacturing apparatus Patent #: 5577621 InventorsAssigneeApplicationNo. 795410 filed on 02/05/1997US Classes:211/41.18, Semiconductor wafer118/500, WORK HOLDERS, OR HANDLING DEVICES206/454Fragile or sensitive (e.g., glass mirror)ExaminersPrimary: Gibson, Robert W. Jr.Attorney, Agent or FirmInternational ClassA47F 007/00Foreign Application Priority Data1996-02-06 JPAbstractA wafer boat includes a plurality of rods arranged substantially parallel to each other at regular intervals. A plurality of ring members are attached to the rods at regular intervals in a longitudinal direction of the rods. A plurality of supporting pieces are attached to each of the ring members. Each of the supporting pieces extends upward from an upper surface portion of each of the ring members and is bent radially inward of the ring member. The supporting pieces of each of the ring members are brought into contact with an edge portions of a lower surface of the wafer to support the wafer. Further, a plurality of convex portions are formed at inner peripheral edge portions of each of the ring members between each pair of adjacent ones of the rods, and extend radially inward of the ring member. | |
