Wafer carrier
June 7, 2015. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 3918756 Automatic wafer feeding and pre-alignment apparatus and method Semiconductor wafer transfer device Reinforced wafer basket Particle-free dockable interface for integrated circuit processing Storage box having resilient fastening means Bottom loading wafer carrier box Apparatus for automated cassette handling Storage box Grip device for sheet-like objects InventorAssigneeApplicationNo. 480692 filed on 06/07/1995US Classes:206/710, For a semiconductor wafer206/454, Fragile or sensitive (e.g., glass mirror)294/31.1, Rim gripping jaws294/33ResilientExaminersPrimary: Ackun, Jacob K.Attorney, Agent or FirmForeign Patent References
International ClassB65D 085/30AbstractA container for semiconductor wafers is disclosed which has a multiplicity of C-shaped wafer holders for individually securing each wafer. Each wafer holder has an open side for receiving and releasing wafers, a closed side with a support portion for supporting the wafer holder in the container. A pair of resilient arcuate arms, each with seating portions and manipulation arms, extend more than 180° around the wafer for retaining the wafers in any orientation.Other References
Field of SearchFor a semiconductor waferHaving plural grooves for retaining wafers Tray having plural circular pockets FOR PLURAL DISCLIKE ARTICLES (E.G., BOTTLE CAPS) Fragile or sensitive (e.g., glass mirror) WORK HOLDERS, OR HANDLING DEVICES DETACHABLE PLATE AND RECEPTACLE LIFTER Resilient Rim gripping jaws | |
