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Opto-electro-mechanical device or filter, process for making, and sensors made therefrom Patent #: 5559358
ApplicationNo. 726050 filed on 09/27/1996
US Classes:359/291, Shape or contour of light control surface altered257/419, With thinned central active portion of semiconductor surrounded by thick insensitive portion (e.g. diaphragm type strain gauge)356/519Having partially reflecting plates in series (e.g., Fabry-Perot type)
ExaminersPrimary: Nelms, David C.
Assistant: Robbins, Thomas
Attorney, Agent or Firm
International ClassG02B 026/00
AbstractAn electrically tunable optical filter utilizing a deformable multi-layer mirror construction.
Field of SearchShape or contour of light control surface altered
By changing physical characteristics (e.g., shape, size or contours) of an optical element
With thinned central active portion of semiconductor surrounded by thick insensitive portion (e.g. diaphragm type strain gauge)